Graphite components for PVD and CVD coating

  • Graphite and components made of graphite are utilized at creating thin layers of TiC and TiN by means of PVD and CVD processes.
  • Due to high thermal, chemical and mechanical resistance of graphite, the following items are utilized at the abovementioned processes:

  • graphite bearing rings
  • perforated carriers
  • blenders
  • holders
  • supply pipes